@misc{indiciae34d2c5d36a22,
  title = {Two-step MEMS microfabrication via 3D direct laser lithography},
  author = {Omar Tricinci and Marco Carlotti and Andrea Desii and Fabian Meder and Virgilio Mattoli},
  year = {2021},
  doi = {10.1117/12.2579213},
  url = {https://arxiv.org/abs/2103.05411},
  note = {Source identifier: 2103.05411}
}