TY  - RPRT
TI  - Two-step MEMS microfabrication via 3D direct laser lithography
AU  - Omar Tricinci
AU  - Marco Carlotti
AU  - Andrea Desii
AU  - Fabian Meder
AU  - Virgilio Mattoli
PY  - 2021
DO  - 10.1117/12.2579213
UR  - https://arxiv.org/abs/2103.05411
ID  - 2103.05411
ER  -