@misc{indiciae7cb0bb9eecd0,
  title = {Area-selective deposition and B \$δ\$-doping of Si(100) with BCl\$\_\{3\}\$},
  author = {K. J. Dwyer and S. Baek and Azadeh Farzaneh and Michael Dreyer and J. R. Williams and R. E. Butera},
  year = {2021},
  doi = {10.1021/acsami.1c10616},
  url = {https://arxiv.org/abs/2103.07529},
  note = {Source identifier: 2103.07529}
}