@misc{indiciaefd2feda075ef,
  title = {Growth of Aluminum Nitride on a Silicon Nitride Substrate for Hybrid Photonic Circuits},
  author = {G. Terrasanta and M. Müller and T. Sommer and S. Geprägs and R. Gross and M. Althammer and M. Poot},
  year = {2021},
  doi = {10.1088/2633-4356/ac08ed},
  url = {https://arxiv.org/abs/2103.08318},
  note = {Source identifier: 2103.08318}
}