@misc{indiciae3792e7b46331,
  title = {Fabrication of superconducting through-silicon vias},
  author = {Justin L. Mallek and Donna-Ruth W. Yost and Danna Rosenberg and Jonilyn L. Yoder and Gregory Calusine and Matt Cook and Rabindra Das and Alexandra Day and Evan Golden and David K. Kim and Jeffery Knecht and Bethany M. Niedzielski and Mollie Schwartz and Arjan Sevi and Corey Stull and Wayne Woods and Andrew J. Kerman and William D. Oliver},
  year = {2021},
  url = {https://arxiv.org/abs/2103.08536},
  note = {Source identifier: 2103.08536}
}