@misc{indiciae3662982338b2, title = {Topological Semimetals for Scaled Back-End-Of-Line Interconnect Beyond Cu}, author = {Ching-Tzu Chen and Utkarsh Bajpai and Nicholas A. Lanzillo and Chuang-Han Hsu and Hsin Lin and Gengchiau Liang}, year = {2021}, doi = {10.1109/iedm13553.2020.9371996}, url = {https://arxiv.org/abs/2103.10505}, note = {Source identifier: 2103.10505} }