@misc{indiciae81972618f42e, title = {On the electron energy distribution function in the high power impulse magnetron sputtering discharge}, author = {Martin Rudolph and A. Revel and D. Lundin and H. Hajihoseini and N. Brenning and M. A. Raadu and A. Anders and T. M. Minea and J. T. Gudmundsson}, year = {2021}, doi = {10.1088/1361-6595/abefa8}, url = {https://arxiv.org/abs/2103.10902}, note = {Source identifier: 2103.10902} }