@misc{indiciae553b39cbb254,
  title = {Photoluminescence of ion-synthesized 9R-Si inclusions in SiO2/Si structure: effect of irradiation dose and oxide film thickness},
  author = {Alena Nikolskaya and Alexey Belov and Alexey Mikhaylov and Anton Konakov and David Tetelbaum and Dmitry Korolev},
  year = {2021},
  doi = {10.1063/5.0052243},
  url = {https://arxiv.org/abs/2103.15867},
  note = {Source identifier: 2103.15867}
}