TY  - RPRT
TI  - Photoluminescence of ion-synthesized 9R-Si inclusions in SiO2/Si structure: effect of irradiation dose and oxide film thickness
AU  - Alena Nikolskaya
AU  - Alexey Belov
AU  - Alexey Mikhaylov
AU  - Anton Konakov
AU  - David Tetelbaum
AU  - Dmitry Korolev
PY  - 2021
DO  - 10.1063/5.0052243
UR  - https://arxiv.org/abs/2103.15867
ID  - 2103.15867
ER  -