@misc{indiciae0a662eb84ffc,
  title = {Fully automated spectroscopic ellipsometry analyses: Application to MoOx thin films},
  author = {Kohei Oiwake and Yukinori Nishigaki and Shohei Fujimoto and Sara Maeda and Hiroyuki Fujiwara},
  year = {2021},
  doi = {10.1063/5.0052210},
  url = {https://arxiv.org/abs/2103.16123},
  note = {Source identifier: 2103.16123}
}