TY  - RPRT
TI  - Fully automated spectroscopic ellipsometry analyses: Application to MoOx thin films
AU  - Kohei Oiwake
AU  - Yukinori Nishigaki
AU  - Shohei Fujimoto
AU  - Sara Maeda
AU  - Hiroyuki Fujiwara
PY  - 2021
DO  - 10.1063/5.0052210
UR  - https://arxiv.org/abs/2103.16123
ID  - 2103.16123
ER  -