@misc{indiciae479f01405867,
  title = {Effects of point defects on oxidation of 3C-SiC},
  author = {Jianqi Xi and Cheng Liu and Izabela Szlufarska},
  year = {2021},
  doi = {10.1016/j.jnucmat.2020.152308},
  url = {https://arxiv.org/abs/2103.16742},
  note = {Source identifier: 2103.16742}
}