@misc{indiciaedcb4bff902ad,
  title = {A Novel Approach for Semiconductor Etching Process with Inductive Biases},
  author = {Sanghoon Myung and Hyunjae Jang and Byungseon Choi and Jisu Ryu and Hyuk Kim and Sang Wuk Park and Changwook Jeong and Dae Sin Kim},
  year = {2021},
  url = {https://arxiv.org/abs/2104.02468},
  note = {Source identifier: 2104.02468}
}