TY  - RPRT
TI  - A Novel Approach for Semiconductor Etching Process with Inductive Biases
AU  - Sanghoon Myung
AU  - Hyunjae Jang
AU  - Byungseon Choi
AU  - Jisu Ryu
AU  - Hyuk Kim
AU  - Sang Wuk Park
AU  - Changwook Jeong
AU  - Dae Sin Kim
PY  - 2021
UR  - https://arxiv.org/abs/2104.02468
ID  - 2104.02468
ER  -