@misc{indiciae440575382888,
  title = {Fabrication of Ultra-High Q Silica Microdisk Using Chemo-Mechanical Polishing},
  author = {S. Honari and S. Haque and Tao Lu},
  year = {2021},
  doi = {10.1063/5.0051674},
  url = {https://arxiv.org/abs/2104.05227},
  note = {Source identifier: 2104.05227}
}