TY - RPRT TI - Energy efficiency of voltage waveform tailoring for the generation of excited species in RF plasma jets operated in He/N$_2$ mixtures AU - Ihor Korolov AU - Zoltán Donkó AU - Gerrit Hübner AU - Yue Liu AU - Thomas Mussenbrock AU - Julian Schulze PY - 2021 DO - 10.1088/1361-6595/ac1c4d UR - https://arxiv.org/abs/2104.06635 ID - 2104.06635 ER -