@misc{indiciaef65480296737, title = {High-Q silicon nitride drum resonators strongly coupled to gates}, author = {Xin Zhou and Srisaran Venkatachalam and Ronghua Zhou and Hao Xu and Alok Pokharel and Andrew Fefferman and Mohammed Zaknoune and Eddy Collin}, year = {2021}, doi = {10.1021/acs.nanolett.1c01477}, url = {https://arxiv.org/abs/2104.07142}, note = {Source identifier: 2104.07142} }