@misc{indiciae3f957c478e4b,
  title = {Deep UV photolithography enhanced geometric homogeneity for low loss photonic crystal waveguides},
  author = {Yahui Xiao and Feifan Wang and Dun Mao and Thomas Kananen and Tiantian Li and Hwaseob Lee and Zi Wang and Tingyi Gu},
  year = {2021},
  url = {https://arxiv.org/abs/2104.09293},
  note = {Source identifier: 2104.09293}
}