@misc{indiciae22d92f00a37a,
  title = {Atomic Layer Deposition of Yttrium Iron Garnet Thin Films for 3D Magnetic Structures},
  author = {M. Lammel and D. Scheffler and D. Pohl and P. Swekis and S. Reitzig and H. Reichlova and R. Schlitz and K. Geishendorf and L. Siegl and B. Rellinghaus and L. M. Eng and K. Nielsch and S. T. B. Goennenwein and A. Thomas},
  year = {2022},
  doi = {10.1103/physrevmaterials.6.044411},
  url = {https://arxiv.org/abs/2104.10293},
  note = {Source identifier: 2104.10293}
}