@misc{indiciae3fc6451e24a4, title = {Improving the doping efficiency of Al in 4H-SiC by co-doping group-IVB elements}, author = {Yuanchao Huang and Rong Wang and Yixiao Qian and Yiqiang Zhang and Deren Yang and Xiaodong Pi}, year = {2021}, doi = {10.1088/1674-1056/ac20ca}, url = {https://arxiv.org/abs/2104.10359}, note = {Source identifier: 2104.10359} }