TY - RPRT TI - Improving the doping efficiency of Al in 4H-SiC by co-doping group-IVB elements AU - Yuanchao Huang AU - Rong Wang AU - Yixiao Qian AU - Yiqiang Zhang AU - Deren Yang AU - Xiaodong Pi PY - 2021 DO - 10.1088/1674-1056/ac20ca UR - https://arxiv.org/abs/2104.10359 ID - 2104.10359 ER -