@misc{indiciae756faab438a5, title = {Metrology for Measuring Custom Periodicities on Diffraction Gratings}, author = {Ningxiao Zhang and Randall McEntaffer and Ross McCurdy and Casey DeRoo}, year = {2021}, url = {https://arxiv.org/abs/2104.11262}, note = {Source identifier: 2104.11262} }