TY  - RPRT
TI  - Metrology for Measuring Custom Periodicities on Diffraction Gratings
AU  - Ningxiao Zhang
AU  - Randall McEntaffer
AU  - Ross McCurdy
AU  - Casey DeRoo
PY  - 2021
UR  - https://arxiv.org/abs/2104.11262
ID  - 2104.11262
ER  -