@misc{indiciae6cf22787ae2b,
  title = {Transverse Ultrafast Laser Inscription in Bulk Silicon},
  author = {M. Chambonneau and M. Blothe and Q. Li and V. Yu. Fedorov and T. Heuermann and M. Gebhardt and C. Gaida and S. Tertelmann and F. Sotier and J. Limpert and S. Tzortzakis and S. Nolte},
  year = {2021},
  doi = {10.1103/physrevresearch.3.043037},
  url = {https://arxiv.org/abs/2104.12084},
  note = {Source identifier: 2104.12084}
}