@misc{indiciae287488021ad0,
  title = {Role of electron and ion irradiation in a reliable lift-off process with e-beam evaporation and a bilayer PMMA resist system},
  author = {Bin Sun and Thomas Grap and Thorben Frahm and Stefan Scholz and Joachim Knoch},
  year = {2021},
  doi = {10.1116/6.0001161},
  url = {https://arxiv.org/abs/2104.12452},
  note = {Source identifier: 2104.12452}
}