TY  - RPRT
TI  - Role of electron and ion irradiation in a reliable lift-off process with e-beam evaporation and a bilayer PMMA resist system
AU  - Bin Sun
AU  - Thomas Grap
AU  - Thorben Frahm
AU  - Stefan Scholz
AU  - Joachim Knoch
PY  - 2021
DO  - 10.1116/6.0001161
UR  - https://arxiv.org/abs/2104.12452
ID  - 2104.12452
ER  -