@misc{indiciae8e872e5ee87e,
  title = {Double Step Annealing for the Recovering of Ion Implantation Defectiveness in 4H-SiC DIMOSFET},
  author = {Massimo Zimbone and Nicolo Piluso and Grazia Litrico and Roberta Nipoti and Riccardo Reitano and MariaConcetta Canino and Maria Ausilia Di Stefano and Simona Lorenti and Francesco La Via},
  year = {2021},
  url = {https://arxiv.org/abs/2104.12467},
  note = {Source identifier: 2104.12467}
}