@misc{indiciae22a3d1867f29,
  title = {Grazing incidence X-ray fluorescence based characterization of nanostructures for element sensitive profile reconstruction},
  author = {Anna Andrle and Philipp Hönicke and Philipp Schneider and Yves Kayser and Martin Hammerschmidt and Sven Burger and Frank Scholze and Burkhard Beckhoff and Victor Soltwisch},
  year = {2021},
  doi = {10.1117/12.2526082},
  url = {https://arxiv.org/abs/2104.13749},
  note = {Source identifier: 2104.13749}
}