@misc{indiciaea9db89172de4,
  title = {Learning-based feedforward augmentation for steady state rejection of residual dynamics on a nanometer-accurate planar actuator system},
  author = {Ioannis Proimadis and Yorick Broens and Roland Tóth and Hans Butler},
  year = {2021},
  url = {https://arxiv.org/abs/2105.01458},
  note = {Source identifier: 2105.01458}
}