TY - RPRT TI - Learning-based feedforward augmentation for steady state rejection of residual dynamics on a nanometer-accurate planar actuator system AU - Ioannis Proimadis AU - Yorick Broens AU - Roland Tóth AU - Hans Butler PY - 2021 UR - https://arxiv.org/abs/2105.01458 ID - 2105.01458 ER -