@misc{indiciaeec90af457a4a,
  title = {Self-bias voltage formation and charged particle dynamics in multi-frequency capacitively coupled plasmas},
  author = {R. U. Masheyeva and K. N. Dzhumagulova and M. Myrzaly and J. Schulze and Z. Donko},
  year = {2021},
  doi = {10.1063/5.0055444},
  url = {https://arxiv.org/abs/2105.01890},
  note = {Source identifier: 2105.01890}
}