TY  - RPRT
TI  - Self-bias voltage formation and charged particle dynamics in multi-frequency capacitively coupled plasmas
AU  - R. U. Masheyeva
AU  - K. N. Dzhumagulova
AU  - M. Myrzaly
AU  - J. Schulze
AU  - Z. Donko
PY  - 2021
DO  - 10.1063/5.0055444
UR  - https://arxiv.org/abs/2105.01890
ID  - 2105.01890
ER  -