@misc{indiciae8d5720b4a57b, title = {Assessment of the (010) \$β\$-Ga\$\_2\$O\$\_3\$ Surface and Substrate Specification}, author = {Michael A. Mastro and Charles R. Eddy, Jr. and Marko J. Tadjer and Jennifer K. Hite and Jihyun Kim and Stephen J. Pearton}, year = {2021}, doi = {10.1116/6.0000725}, url = {https://arxiv.org/abs/2105.03741}, note = {Source identifier: 2105.03741} }