@misc{indiciaef0bcea9f02b5,
  title = {Thermal IR detection with nanoelectromechanical silicon nitride trampoline resonators},
  author = {Markus Piller and Johannes Hiesberger and Elisabeth Wistrela and Paolo Martini and Niklas Luhmann and Silvan Schmid},
  year = {2022},
  url = {https://arxiv.org/abs/2105.03999},
  note = {Source identifier: 2105.03999}
}