@misc{indiciae9a95454dd826,
  title = {Planar and 3-dimensional damage free etching of \$β\$-Ga2O3 using atomic gallium flux},
  author = {Nidhin Kurian Kalarickal and Andreas Fiedler and Sushovan Dhara and Mohammad Wahidur Rahman and Taeyoung Kim and Zhanbo Xia and Zane Jamal Eddine and Ashok Dheenan and Mark Brenner and Siddharth Rajan},
  year = {2021},
  doi = {10.1063/5.0057203},
  url = {https://arxiv.org/abs/2105.09503},
  note = {Source identifier: 2105.09503}
}