@misc{indiciaea10f969b2f3b,
  title = {EUV-induced Hydrogen Plasma : Pulsed Mode Operation and Confinement in Scanner},
  author = {Mark van de Kerkhof and Andrei M. Yakunin and Dmitry Astakhov and Maarten van Kampen and Ruud van der Horst and Vadim Banine},
  year = {2021},
  url = {https://arxiv.org/abs/2105.10029},
  note = {Source identifier: 2105.10029}
}