@misc{indiciae179f4d8eaf5e, title = {Measurements and modeling of atomic-scale sidewall roughness and losses in integrated photonic devices}, author = {Samantha Roberts and Xingchen Ji and Jaime Cardenas and Mateus Corato-Zanarella and Michal Lipson}, year = {2022}, doi = {10.1002/adom.202102073}, url = {https://arxiv.org/abs/2105.11477}, note = {Source identifier: 2105.11477} }