TY  - RPRT
TI  - Measurements and modeling of atomic-scale sidewall roughness and losses in integrated photonic devices
AU  - Samantha Roberts
AU  - Xingchen Ji
AU  - Jaime Cardenas
AU  - Mateus Corato-Zanarella
AU  - Michal Lipson
PY  - 2022
DO  - 10.1002/adom.202102073
UR  - https://arxiv.org/abs/2105.11477
ID  - 2105.11477
ER  -