@misc{indiciae2ba7fe8de373,
  title = {The impact of stochastic incorporation on atomic-precision Si:P arrays},
  author = {Jeffrey A. Ivie and Quinn Campbell and Justin C. Koepke and Mitchell I. Brickson and Peter A. Schultz and Richard P. Muller and Andrew M. Mounce and Daniel R. Ward and Malcom S. Carroll and Ezra Bussmann and Andrew D. Baczewski and Shashank Misra},
  year = {2021},
  doi = {10.1103/physrevapplied.16.054037},
  url = {https://arxiv.org/abs/2105.12074},
  note = {Source identifier: 2105.12074}
}