@misc{indiciae4390cd26eb7f,
  title = {Irradiation driven molecular dynamics simulation of the FEBID process for Pt(PF\$\_3\$)\$\_4\$},
  author = {Alexey Prosvetov and Alexey V. Verkhovtsev and Gennady B. Sushko and Andrey V. Solov'yov},
  year = {2021},
  doi = {10.3762/bjnano.12.86},
  url = {https://arxiv.org/abs/2105.12206},
  note = {Source identifier: 2105.12206}
}