TY  - RPRT
TI  - Irradiation driven molecular dynamics simulation of the FEBID process for Pt(PF$_3$)$_4$
AU  - Alexey Prosvetov
AU  - Alexey V. Verkhovtsev
AU  - Gennady B. Sushko
AU  - Andrey V. Solov'yov
PY  - 2021
DO  - 10.3762/bjnano.12.86
UR  - https://arxiv.org/abs/2105.12206
ID  - 2105.12206
ER  -