@misc{indiciaeed83c429fb0e,
  title = {Ionized particle transport in reactive HiPIMS discharge: correlation between the energy distribution functions of neutral and ionized atoms},
  author = {Abderzak El Farsy and Dimitri Boivin and Cédric Noel and Robert Hugon and Stephane Cuynet and Jamal Bougdira and Ludovic de Poucques},
  year = {2021},
  doi = {10.1088/1361-6595/ac02b4},
  url = {https://arxiv.org/abs/2105.14925},
  note = {Source identifier: 2105.14925}
}