TY  - RPRT
TI  - Ionized particle transport in reactive HiPIMS discharge: correlation between the energy distribution functions of neutral and ionized atoms
AU  - Abderzak El Farsy
AU  - Dimitri Boivin
AU  - Cédric Noel
AU  - Robert Hugon
AU  - Stephane Cuynet
AU  - Jamal Bougdira
AU  - Ludovic de Poucques
PY  - 2021
DO  - 10.1088/1361-6595/ac02b4
UR  - https://arxiv.org/abs/2105.14925
ID  - 2105.14925
ER  -