@misc{indiciaeece192c38cc5,
  title = {Kinetic investigation of the planar Multipole Resonance Probe in the low-pressure plasma},
  author = {Chunjie Wang and Michael Friedrichs and Jens Oberrath and Ralf Peter Brinkmann},
  year = {2021},
  doi = {10.1088/1361-6595/ac27bb},
  url = {https://arxiv.org/abs/2106.00082},
  note = {Source identifier: 2106.00082}
}