TY - RPRT TI - Kinetic investigation of the planar Multipole Resonance Probe in the low-pressure plasma AU - Chunjie Wang AU - Michael Friedrichs AU - Jens Oberrath AU - Ralf Peter Brinkmann PY - 2021 DO - 10.1088/1361-6595/ac27bb UR - https://arxiv.org/abs/2106.00082 ID - 2106.00082 ER -