@misc{indiciae9c0cd0773310, title = {Simultaneous microscopic imaging of thickness and refractive index of thin layers by heterodyne interferometric reflectometry (HiRef)}, author = {Alexander Nahmad-Rohen and David Regan and Paola Borri and Wolfgang Langbein}, year = {2021}, url = {https://arxiv.org/abs/2106.06698}, note = {Source identifier: 2106.06698} }