TY  - RPRT
TI  - Simultaneous microscopic imaging of thickness and refractive index of thin layers by heterodyne interferometric reflectometry (HiRef)
AU  - Alexander Nahmad-Rohen
AU  - David Regan
AU  - Paola Borri
AU  - Wolfgang Langbein
PY  - 2021
UR  - https://arxiv.org/abs/2106.06698
ID  - 2106.06698
ER  -