@misc{indiciae4305619db6be,
  title = {Reactor scale simulations of ALD and ALE: ideal and non-ideal self-limited processes in a cylindrical and a 300 mm wafer cross-flow reactor},
  author = {Angel Yanguas-Gil and Joseph A. Libera and Jeffrey W. Elam},
  year = {2021},
  doi = {10.1116/6.0001212},
  url = {https://arxiv.org/abs/2106.07132},
  note = {Source identifier: 2106.07132}
}