TY  - RPRT
TI  - Reactor scale simulations of ALD and ALE: ideal and non-ideal self-limited processes in a cylindrical and a 300 mm wafer cross-flow reactor
AU  - Angel Yanguas-Gil
AU  - Joseph A. Libera
AU  - Jeffrey W. Elam
PY  - 2021
DO  - 10.1116/6.0001212
UR  - https://arxiv.org/abs/2106.07132
ID  - 2106.07132
ER  -