TY  - RPRT
TI  - Active feedback cooling of a SiN membrane resonator by electrostatic actuation
AU  - Antonio Borrielli
AU  - Michele Bonaldi
AU  - Enrico Serra
AU  - Pasqualina Maria Sarro
AU  - Bruno Morana
PY  - 2021
DO  - 10.1063/5.0049721
UR  - https://arxiv.org/abs/2106.08840
ID  - 2106.08840
ER  -